Interfacial toughness of diamond-like nanocomposite (DLN) thin films on silicon nitride substrates

Journal of Materials Science Letters

Volumn 22, Issue 18, 2003, Pages 1261-1262

  Pandit, A ^a,b   Padture, N P ^a  

^a UNIVERSITY OF CONNECTICUT   (United States)

^b SHIPLEY COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; ELASTIC MODULI; FRACTURE TOUGHNESS; HARDNESS; INDENTATION; INTERFACES (MATERIALS); PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SILICON NITRIDE; SUBSTRATES; THIN FILMS; VICKERS HARDNESS TESTING;

DIAMOND-LIKE NANOCOMPOSITE; INTERFACIAL FRACTURE RESISTANCE; INTERFACIAL TOUGHNESS; NANOINDENTATION;

NANOSTRUCTURED MATERIALS;

EID: 0141975195     PISSN: 02618028     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1025406118204     Document Type: Article

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