Fabrication and photodegradation behavior of photosensitive polyimide LB film

Molecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals

Volumn 370, Issue , 2001, Pages 169-172

  Oh, Se Young ^a   Park, Joon Kyu ^a   Choi, Jeong Woo ^a   Chung, Chan Moon ^b  

^a Sogang University   (South Korea)

^b Yonsei University Wonju   (South Korea)

Author keywords

Photodegradation behavior; Polyamic acid; Polyimide LB film; Positive resist; Resolution

Indexed keywords

EID: 0141972565     PISSN: 1058725X     EISSN: None     Source Type: Journal    
DOI: 10.1080/10587250108030063     Document Type: Article

References (1)

1. S.Y. Oh, J.Y. Lee, S.Y. Cho, and C.M. Chung, Polvmer(Korea) 24, 407 (2000).