The Development of a Powerful Vortex Stabilized Flash Lamp for RTP Applications

IEEE International Conference on Plasma Science

Volumn , Issue , 2003, Pages 451-

  Thrum, T ^a   Camm, D ^a   Hewett, A ^a   Stuart, G ^a  

^a Vortek Industries Ltd   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COOLING; ELECTRIC CURRENTS; MICROPROCESSOR CHIPS; RADIATION; RAPID THERMAL ANNEALING; SILICON WAFERS;

FLASH LAMPS;

ELECTRIC LAMPS;

EID: 0141961892     PISSN: 07309244     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)