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Volumn 271, Issue , 2002, Pages 33-38
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Influence of oxygen flow on crystallization and morphology of LiNbO 3 thin films
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Author keywords
Crystallization; Rietveld analysis
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CRYSTALLINE MATERIALS;
FLOW OF FLUIDS;
LITHIUM NIOBATE;
MORPHOLOGY;
OXYGEN;
SILICON;
SPIN COATING;
LINBO3;
OXYGEN FLOW;
RIETVELD ANALYSIS;
SUBSTRATE SURFACE;
THIN FILMS;
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EID: 0141943464
PISSN: 00150193
EISSN: 15635112
Source Type: Journal
DOI: 10.1080/713716163 Document Type: Conference Paper |
Times cited : (16)
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References (10)
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