Spectroscopic Ellipsometry Characterization of Al doped ZnO Thin Films Deposited by PLD

IEEE International Conference on Plasma Science

Volumn , Issue , 2003, Pages 312-

  Shan, F K ^a   Kim, S Y ^b   Yu, Y S ^a  

^a Dong Eui University   (South Korea)

^b Ajou University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; PULSED LASER DEPOSITION; SEMICONDUCTOR DOPING; SPECTROSCOPIC ANALYSIS; ZINC OXIDE;

SPECTROSCOPIC ELLIPSOMETRY;

THIN FILMS;

EID: 0141928027     PISSN: 07309244     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)