Shadow Effects in Mesh-Assisted Plasma Immersion Ion Implantation of Insulating Materials

IEEE International Conference on Plasma Science

Volumn , Issue , 2003, Pages 279-

  Tian, X B ^a,b   Fu, R K Y ^b   Yang, S Q ^a   Chu, Paul K ^b  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE MATERIALS; ELECTRIC POTENTIAL; ION IMPLANTATION; MATERIALS SCIENCE;

PLASMA IMMERSION;

INSULATING MATERIALS;

EID: 0141893545     PISSN: 07309244     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)