Investigation of boron and hydrogen concentrations in p-type diamond films by infrared spectroscopy

Diamond and Related Materials

Volumn 4, Issue 4, 1995, Pages 469-472

  Erz, R ^a   Dotter W ^a   Jung, K ^a   Ehrhardt, H ^a  

^a UNIVERSITY OF KAISERSLAUTERN   (Germany)

Author keywords

Boron doping; Impurities; Infrared absorption; Microwave plasma CVD

Indexed keywords

EID: 0141875213     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(94)05320-0     Document Type: Article

References (11)

1. IR characterization of diamond films on Si substrates
2. Proc. 3rd Int. Symp. on Diamond Materials
3. SPIE 1534 Diamond Optics
4. Synthesis of Diamond Thin Films Having Semiconductive Properties
5. Conduction in non-crystalline systems