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Volumn 14, Issue 4, 2003, Pages 30-35

Laser Beam Shaping

Author keywords

[No Author keywords available]

Indexed keywords

LASER BEAMS; LIGHT MODULATION; LITHOGRAPHY; PRINTED CIRCUIT BOARDS; PRINTING; QUANTUM THEORY; SEMICONDUCTOR LASERS;

EID: 0141868814     PISSN: 10476938     EISSN: None     Source Type: Trade Journal    
DOI: 10.1364/OPN.14.4.000030     Document Type: Article
Times cited : (45)

References (12)
  • 4
  • 5
    • 0343100485 scopus 로고
    • S. Ream, Laser Focus, 15(11), 68-71 (1979).
    • (1979) Laser Focus , vol.15 , Issue.11 , pp. 68-71
    • Ream, S.1
  • 10
    • 85076260499 scopus 로고
    • Depth of Focus and Resolution Enhancement for i-line and Deep-UV Lithography Using Annular Illumination
    • W.N. Partlo, P. J. Tompkins, P. G. Dewa and P. F. Michaloski, "Depth of Focus and Resolution Enhancement for i-line and Deep-UV Lithography Using Annular Illumination," SPIE Proc. 1927, 137-57 (1993).
    • (1993) SPIE Proc. , vol.1927 , pp. 137-157
    • Partlo, W.N.1    Tompkins, P.J.2    Dewa, P.G.3    Michaloski, P.F.4
  • 11
    • 2342488603 scopus 로고    scopus 로고
    • High-Speed Microvia Formation With UV Solid State Lasers
    • C. Dunsky, "High-Speed Microvia Formation With UV Solid State Lasers," IEEE Proc. 90(10), 1670-80 (2002).
    • (2002) IEEE Proc. , vol.90 , Issue.10 , pp. 1670-1680
    • Dunsky, C.1
  • 12
    • 0034547202 scopus 로고    scopus 로고
    • Design of a Laser Printer Using a Laser Array and Beam Homogenizer
    • A. F. Kurtz, "Design of a Laser Printer Using a Laser Array and Beam Homogenizer, SPIE Proc. 4095, 147-53 (2000).
    • (2000) SPIE Proc. , vol.4095 , pp. 147-153
    • Kurtz, A.F.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.