Development of radiation-magnetohydrodynamic computer modeling of gas-discharge EUV sources for microlithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5037 I, Issue , 2003, Pages 130-140

  Bauer, Bruno S ^a   Esaulov, Andrey ^a   Makhin, Volodymyr ^a   Mancini, Roberto C ^a   Paraschiv, Ioana ^a   Presura, Radu ^a   Lindemuth, Irvin R ^b   Sheehey, Peter T ^b   Rice, Bryan J ^c  

^a UNIVERSITY OF NEVADA   (United States)

^b LOS ALAMOS NATIONAL LABORATORY   (United States)

^c INTEL CORPORATION   (United States)

Author keywords

Atomic kinetics and radiation model; Dense plasma focus; EUV radiative source; MHD simulation

Indexed keywords

ATOMS; COMPUTER SIMULATION; ELECTRIC DISCHARGES; IONS; LIGHT SOURCES; MAGNETOHYDRODYNAMICS; MATHEMATICAL MODELS; PLASMAS; REACTION KINETICS; TEMPERATURE; ULTRAVIOLET RADIATION; XENON;

COLLISIONAL RADIATIVE ATOMIC KINETICS; DENSE PLASMA FOCUS; EXTREME ULTRAVIOLET; GAS DISCHARGE; RADIATION MAGNETOHYDRODYNAMIC COMPUTER MODELLING;

LITHOGRAPHY;

EID: 0141836160     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.484933     Document Type: Conference Paper

References (4)

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2. S.I. Braginskii, Transport Processes in a Plasma, in Review of Plasma Physics, edited by M.A. Leontovich (Consultants Bureau, New York, 1965), Vol. I, p. 205.
3. N. Bobrova, A. Esaulov, J. Sakai, P. Sasorov, D. Spence, A. Butler, S. Hooker, and S. Bulanov, "Simulations of a hydrogen-filled capillary discharge waveguide", Phys. Rev. E 65, 016407 (1-11) (2002)
4. R.D. Cowan, The Theory of Atomic Structure and Spectra (University of California Press, Berkeley, 1981).