|
Volumn 4968, Issue , 2003, Pages 134-142
|
High peak power solid state laser for micromachining of hard materials
|
Author keywords
DPSS laser; Micro structuring; Micromachining; UV light
|
Indexed keywords
AUTOMOBILE ENGINES;
AUTOMOTIVE INDUSTRY;
DIAMONDS;
MICROELECTRONICS;
MICROMACHINING;
MICROOPTICS;
PUMPING (LASER);
SEMICONDUCTOR LASERS;
SILICON;
SYNTHETIC FIBERS;
HARD MATERIALS;
SOLID STATE LASERS;
|
EID: 0141828453
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.478958 Document Type: Conference Paper |
Times cited : (13)
|
References (5)
|