Plasma-surface interaction at sharp edges and corners during ion-assisted physical vapor deposition. Part II: Enhancement of the edge-related effects at sharp corners

Journal of Applied Physics

Volumn 94, Issue 5, 2003, Pages 2837-2844

  Macak, E B ^a   Munz W D ^a   Rodenburg, J M ^a  

^a SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; COMPOSITION; DELAMINATION; PHYSICAL VAPOR DEPOSITION; PLASMA SHEATHS;

PLASMA-SURFACE INTERACTION;

PLASMA THEORY;

EID: 0141746011     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1597756     Document Type: Article

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