Study on optimizing the performance of infrared detectors using material chip technology

Semiconductor Science and Technology

Volumn 18, Issue 9, 2003, Pages 887-890

  Chen, G B ^a,b   Lu, W ^a   Chen, X S ^a   Li, Z F ^a   Cai, W Y ^a   He, L ^a   Hu, X N ^a   Li, Y J ^a   Shen, S C ^a  

^a SHANGHAI INSTITUTE OF TECHNICAL PHYSICS   (China)

^b SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; ELECTRIC POTENTIAL; FILM GROWTH; INFRARED RADIATION; ION IMPLANTATION; MOLECULAR BEAM EPITAXY; OPTIMIZATION; SEMICONDUCTOR JUNCTIONS;

MATERIAL CHIP TECHNOLOGY;

RADIATION DETECTORS;

EID: 0141745996     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/18/9/313     Document Type: Article

References (7)

1. Shen S C 1993 Semicond. Sci. Technol. 8 S443
2. Reine M B, Sood A K and Tredwell T J 1981 Semiconductors and Semimetals vol 18 ed R K Willardson and A C Beer (New York: Academic) p 246
3. Xiang X D, Sun X D, Briceno G, Lou Y L, Wang K A, Chang H, Wallace-Freedman W, Chen S W and Schultz P G 1995 Science 268 1738
4. Liu X Q, Li Z F, Lu W, Shen X C, Chen C M, Zhu D Z, Hu J and Li M Q 1999 Appl. Phys. Lett. 75 2611
5. He L, Yang J R, Wang Sh L, Guo S P, Yu M F, Chen X Q, Fang W Zh, Qiao Y M, Zhang Q Y, Ding R J and Xin T L 1997 J. Cryst. Growth 175/176 677
6. Kolodny A and Kidron I 1980 IEEE Trans. Electron Devices 27 37
7. Chen X S, Liu X Q, Wan M F, Lu W, Shi G L, Mu Y M, Yan L P, Qiao Y M and Shen S C 1998 Narrow Gap Semiconductors ed S C Shen, D Y Tan, G Z Zheng and G Bauer (Singapore: World Scientific) p 383