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Volumn 5040 I, Issue , 2003, Pages 510-519
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The effects of radiation induced carbon contamination on the performance of an EUV lithographic optic
a b |
Author keywords
[No Author keywords available]
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Indexed keywords
CAMERAS;
CARBON;
CONTAMINATION;
DEPOSITION;
HYDROCARBONS;
LIGHT ABSORPTION;
LIGHT REFLECTION;
OPTICAL MULTILAYERS;
OPTICS;
PHOTORESISTS;
RADIATION EFFECTS;
ULTRAVIOLET RADIATION;
CARBON CONTAMINATION;
CARBON DEPOSITION;
EXTREME ULTRAVIOLET LITHOGRAPHY;
LITHOGRAPHY;
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EID: 0141722373
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (0)
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