Quantum chemical mechanism of heterogeneous reaction between trichlorosilane and adsorbed water

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 7 A, 2003, Pages 4540-4541

  Makita, Toshiki ^a   Nakamura, Koichi ^a   Tachibana, Akitomo ^a   Masusaki, Hiroshi ^b   Matsumoto, Koh ^b   Ishihara, Yoshio ^b  

^a KYOTO UNIVERSITY   (Japan)

^b TAIYO NIPPON SANSO CORPORATION   (Japan)

Author keywords

HCl elimination; Heterogeneous reaction; Quantum mechanical energy density; Regional density functional theory; Trichlorosilane

Indexed keywords

ACTIVATION ENERGY; CALCULATIONS; ELECTRON TRANSITIONS; HYDROCHLORIC ACID; PROBABILITY DENSITY FUNCTION; REACTION KINETICS; SILANES; STEEL; SURFACE REACTIONS; WATER;

ELIMINATION PROCESS; HETEROGENEOUS REACTION; QUANTUM MECHANICAL ENERGY DENSITY; TRICHLOROSILANE;

QUANTUM THEORY;

EID: 0141717887     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.4540     Document Type: Article

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