Diagnosis of VHF plasmas with optical emission spectroscopy

Wuli Xuebao/Acta Physica Sinica

Volumn 52, Issue 9, 2003, Pages 2324-

  Yang, Hui Dong ^a   Wu, Chun Ya ^a   Li, Hong Bo ^a   Mai, Yao Hua ^a   Zhu, Feng ^a   Zhou, Zhen Hua ^a   Zhao, Ying ^a   Geng, Xin Hua ^a   Xiong, Shao Zhen ^a  

^a NONE

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EID: 0141706745     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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