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Volumn 2, Issue , 2003, Pages 1167-1170
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Design and fabrication of a micro-tactile sensor
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Author keywords
Mechatronics; MEMS; Silicon; Smart Materials; Tactile Sensors
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Indexed keywords
ANISOTROPY;
DYNAMIC RESPONSE;
ENDOSCOPY;
ETCHING;
MANAGEMENT INFORMATION SYSTEMS;
MECHATRONICS;
MICROELECTROMECHANICAL DEVICES;
SURGERY;
VLSI CIRCUITS;
MICRO-TACTILE SENSORS;
MICROSENSORS;
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EID: 0141651625
PISSN: 08407789
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (23)
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References (7)
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