Silicon-glass micromachined chromatographic microcolumn

Journal of Capillary Electrophoresis and Microchip Technology

Volumn 6, Issue 1-2, 1999, Pages 37-41

  Dziuban, Jan ^a   Górecka Drzazga, Anna ^a   Nieradko, Łukasz ^a   Małecki, Krzysztof ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

TAS; Anodic bonding; Silicon capillary; Silicon micromachining

Indexed keywords

GLASS; SILICON;

ACCURACY; ARTICLE; BIOMOLECULAR ELECTRONICS; CAPILLARY CHROMATOGRAPHY; COMPUTER SYSTEM; INTEGRATED CIRCUIT; SIGNAL DETECTION; THERMAL CONDUCTIVITY;

EID: 0141615138     PISSN: 10795383     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

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