Interference microscope for sub-angstrom surface roughness measurements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5144, Issue , 2003, Pages 37-45

  Saxer, Christopher ^a   Freischlad, Klaus ^a  

^a ADE Phase Shift   (United States)

Author keywords

Interferometry; Microscope; Phase shifting; Roughness

Indexed keywords

ALGORITHMS; CAMERAS; INTERFEROMETRY; LIGHT INTERFERENCE; MICROSCOPIC EXAMINATION; OPTICAL DESIGN; OPTICAL PROPERTIES; OPTICS; SPURIOUS SIGNAL NOISE; SURFACE PROPERTIES;

ASPHERIC OPTICAL SURFACE; DIGITAL CAMERA; INTERFERENCE MICROSCOPE; OPTO-MECHANICAL SYSTEM; PHASE SHIFTING MICROSCOPE; SURFACE ROUGHNESS MEASUREMENT;

ROUGHNESS MEASUREMENT;

EID: 0141608988     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.500925     Document Type: Conference Paper

References (7)

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