Evaluation of hydroxyl content in commercial X-cut LiNbO3 wafers for optical waveguide devices

Optical Engineering

Volumn 37, Issue 5, 1998, Pages 1612-1617

  Nagata, Hirotoshi ^a  

^a SUMITOMO OSAKA CEMENT CO LTD   (Japan)

Author keywords

Process inspection; Wafer; Waveguide devices

Indexed keywords

EID: 0141567027     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601675     Document Type: Article

References (16)

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