Three dimensional axisymmetric space charge simulation via boundary elements and emitted particles

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 3, 1996, Pages 1952-1957

  Hartman, Robert L ^a   Mackie, William A ^b   Davis, Paul R ^b  

^a Linfield Research Institute ^*  (United States)

^b Linfield Research Institute   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0141559699     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588962     Document Type: Article

References (6)

1. R. L. Hartman, W. A. Mackie, and Paul R. Davis, J. Vac. Sci. Technol. B 12, 754 (1994).
2. O. D. Kellogg, Foundations of Potential Theory (Springer, New York, 1929), p. 59.
3. R. Bulirsch, Numer. Math. 7, 78 (1965).
4. R. L. Burden, J. D. Faires, and A. C. Reynolds, Numerical Analysis, 2nd ed. (Prindle, Boston, 1981).
5. R. Gomer, Field Emission and Field Ionization (Harvard University Press, Cambridge, MA, 1961).
6. W. A. Anderson, J. Vac. Sci. Technol. B 11, 383 (1993).