Dependence of the emission characteristics of magnetized surface-wave plasmas on the azimuthal configuration of the wave field

Journal of Applied Physics

Volumn 82, Issue 9, 1997, Pages 4211-4218

  Peres I ^a   Dallaire, A ^a   Jones, P ^a   Margot, J ^a  

^a UNIVERSITÉ DE MONTRÉAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0141539899     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366224     Document Type: Article

References (11)

1. For a review of applications of surface-wave discharges, see, for example, J. Margot, and M. Moisan, in Proceedings of the NATO ASI on Plasma Processing of Semiconductors, Bonas, France, June 1996 (unpublished).
2. J. Margot-Chaker, M. Moisan, M. Chaker, V. M. M. Glaude, P. Lauque, J. Paraszczak, and G. Sauvé, J. Appl. Phys. 66, 4134 (1989).
3. I. Zhelyaskov and V. Atanassov, Phys. Rep. 255, 79 (1995).
4. E. Benova, P. Staikov, and I. Zhelyazkov, J. Plasma Phys. 48, 37 (1992).
5. I. Pérès, M. Fortin, and J. Margot, Phys. Plasmas 3, 1754 (1996).
6. C. M. Ferreira, M. Moisan, and Z. Zakrzewski, Physical Principles of Microwave Plasma Generation, in Microwave Excited Plasmas, edited by J. Pelletier and M. Moisan (Elsevier, New York, 1992), Chap. 2, pp. 11-52.
7. J. Margot and M. Moisan, J. Phys. D 24, 1765 (1991).
8. J. Margot-Chaker, M. Moisan, Z. Zakrzewski, V. M. Glaude, and G. Sauvé, Radio Sci. 23, 1120 (1988).
9. J. Margot, M. Moisan, and A. Ricard, Appl. Spectrosc. 45, 260 (1991).
10. J. Marec and P. Leprince, Microwave Discharges: Structures and Stability, in Microwave Discharges: Fundamentals and Applications, edited by C. M. Ferreira and M. Moisan (Plenum, New York, 1993), pp. 45-63.
11. M. Moisan and Z. Zakrzewski, Surface-Wave Plasma Sources, in Microwave Excited Plasmas, edited by J. Pelletier and M. Moisan (Elsevier, New York, 1992), Chap. 5, pp. 123-180.