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Volumn , Issue 540, 2003, Pages 439-443
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COPS - A novel pressure gauge using mems devices for space
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Author keywords
[No Author keywords available]
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Indexed keywords
INDUSTRIAL APPLICATIONS;
MICROELECTROMECHANICAL DEVICES;
PARTIAL PRESSURE;
PARTIAL PRESSURE SENSORS;
PRESSURE GAGES;
PROJECT MANAGEMENT;
VACUUM TECHNOLOGY;
RESIDUAL GAS;
SPACE RESEARCH;
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EID: 0141537260
PISSN: 03796566
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (3)
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References (4)
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