Fabrication of a self-aligned microtip field emission array

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 4, 2003, Pages 1560-1565

  Forrest, R D ^a   Cox, D C ^a   Tang, Y F ^a   Shannon, J M ^a   Silva, S R P ^a  

^a UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; FABRICATION; FIELD EMISSION CATHODES; FLAT PANEL DISPLAYS; LIQUID CRYSTAL DISPLAYS; MICROELECTRONICS; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

FIELD EMITTER ARRAYS (FEA);

ELECTRON EMISSION;

EID: 0141458169     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1596221     Document Type: Conference Paper

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