Characterization of excimer laser beam parameters

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2870, Issue , 1996, Pages 367-377

  Mann, K ^a   Ohlenbusch, J ^a   Westphal, V ^a  

^a LASER LABORATORIUM GÖTTINGEN E V   (Germany)

Author keywords

Beam characterization; Beam width; Energy density distribution; Excimer lasers; Uniformity; UV detector

Indexed keywords

EXCIMER LASERS; LASER BEAMS; ULTRAVIOLET DETECTORS;

BACKGROUND SUBTRACTION; BEAM CHARACTERIZATION; BEAM WIDTHS; CALIBRATION PROCEDURE; ENERGY DENSITY DISTRIBUTIONS; LASER BEAM PARAMETERS; SEMI-ANALYTICAL METHODS; UNIFORMITY;

PARAMETER ESTIMATION;

EID: 0141428148     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.259920     Document Type: Conference Paper

References (13)

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