Finite element investigation into proposed bearing mechanism for a fluid driven micro actuator

Microsystem Technologies

Volumn 5, Issue 4, 1999, Pages 200-204

  Dhariwal, R S ^a   Flockhart, S M ^a  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0043286495     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050164     Document Type: Article

References (5)

1. Wolffenbuttel RF; Goosen JFL (1991) Design considerations for a permanent-rotor-charge-excitedmicromotor with an electrostatic bearing. Sensors and Actuators A 25-27: 583-590
2. Kumar S; Cho D; Carr WN (1992) Experimental study of electric suspension for microbearings. J Microelectromech Systems 1 (1): 23-30
3. Shaw MC; Macks EF (1949) Analysis and Lubrication of Bearings. McGraw-Hill Publications in Aeronautical Science, New York
4. Flockhart SM; Mathieson D; Yang SJ; Dhariwal RS (1997) Characteristics of microturbines fabricated using the UV-LIGA technique. Int Conf on Micromechatronics for Information and Precision Equipment, Tokyo, July 20-23, pp 329-334
5. Pinkus O; Sternlicht B (1961) Theory of Hydrodynamic Lubrication. McGraw-Hill, New York, pp 116-135