Fabrication of binary phase surface relief optical elements by selective deposition of dielectric layers

Review of Scientific Instruments

Volumn 70, Issue 2, 1999, Pages 1264-1267

  Davidson, N ^a   Ozeri, R ^a   Baron, R ^a  

^a WEIZMANN INSTITUTE OF SCIENCE   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0043265850     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1149583     Document Type: Article

References (8)

1. G. J. Swanson and W. B. Vedkamp, Opt. Eng. (Bellingham) 28, 605 (1989).
2. W. H. Lee, in Progress in Optics, edited by E. Wolf (Elsevier, Amsterdam, 1978). Vol. 16, pp. 119-232.
3. E. Hasman, N. Davidson, and A. A. Friesem, Opt. Lett. 16, 423 (1991).
4. E. Hasman, N. Davidson, and A. A. Friesem, Opt. Lett. 16, 1460 (1991).
5. Thin Film Processes, edited by J. L. Vossen and W. Kern (Academic, New York, 1978).
6. High vacuum coating system BAK600, made by Balzers.
7. We also tried to stop the evaporation at the middle of a reflection fringe, where the slope of the reflection plot is maximal, and therefore is also the expected sensitivity. However, being more sensitive to dc offsets it was found to be less reproducible than stopping the evaporation at the fringe minima.
8. R. Ozery, L. Khaykovich, and N. Davidson. European Quantum Electronics Conference '98 Technical Digest. QWC28, 1998, p. 127.