Interferometric Calibration Procedures of the Step-Width Control of a Phase-Stepping Interferometer;Interferometrische Kalibrierverfahren für die Schrittweitensteuerung eines Phasenverschiebeinterferometers

Technisches Messen

Volumn 67, Issue 7-8, 2000, Pages 328-333

  Nicolaus, Arnold ^a   Bönsch, Gerhard ^a   Kang, Chu Shik ^b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b Korea Research Institute of Standards and Science   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIMENSIONAL MEASUREMENTS; INTEGRATED CAPACITIVE SENSORS; INTERFEROMETRIC CALIBRATION; PIEZO-ACTUATORS; PHASE STEPPING; STEP WIDTHS;

CAPACITIVE SENSORS; INTERFEROMETRY; INTERFEROMETERS;

INTERFEROMETERS; CAPACITIVE SENSORS;

EID: 0043263030     PISSN: 01718096     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

1. Creath, Katherine: "Phase-measurement interferometry techniques", Progress in optics XXVI, E. Wolf (Ed.), S. 349-393, 1988.
2. Hariharan, Parameswaran: Optical Interferometry, Academic Press, Harcourt Brace Jovanovich, Publishers, Australia, 1985.
3. G. Bönsch, H. Böhme: "Phase-determination of Fizeau interferences by phase-shifting interferometry", Optik 82, S. 161-164, 1989.
4. R. A. Nicolaus: "Evaluation of Fizeau interferences by phase-shifting interferometry", Optik 87, S. 23-26, 1991.
5. R. A. Nicolaus: "Precise method to determine systematic errors in phase-shifting interferometry on Fizeau interferences", Applied Optics, Vol. 32, No. 31, S. 6380-6386, 1993.