A novel laser trimming technique for microelectronics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4274, Issue , 2001, Pages 385-392

  Meunier, M ^a,b   Gagnon, Y ^b   Savaria, Y ^a,b   Lacourse, A ^a,b   Cadotte, M ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b LTRIM Technologies Inc   (Canada)

Author keywords

Analogue microelectronics; Laser trimming; Resistance

Indexed keywords

AUTOMATION; ELECTRIC RESISTANCE; LASER APPLICATIONS; LASER BEAMS; MICROELECTRONICS; SEMICONDUCTOR JUNCTIONS; TRIMMING;

AUTOMATED SYSTEMS; DEVICE CHARACTERIZATION; FULLY COMPATIBLE; ITERATIVE PROCESS; LASER TRIMMING; PN JUNCTION DIODES; PROCESS MODELING; THERMAL COEFFICIENTS;

ITERATIVE METHODS;

EID: 0043253433     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.432531     Document Type: Conference Paper

References (19)

1. S.S. Taylor, and P.J. Hanlon, "A Dynamically Precise 50 MHz 12-Bit DAC Using Laser-Wafer-Trimming", Proceedings of the 26th Midwest Symposium on Circuits and Systems, Edited by E.S. Sinencio, pp. 218-222, Western Periodicals, North Hollywood, CA, 1983.
2. P. Fehlhaber, "Laser trimming of silicon-chromium thin-film resistors", Solid-State Technol., 14, pp. 33-36, 1971.
3. R.K. Waits, "Silicon-chromium thin-film resistor reliability", Thin Solid Films, 16, pp. 237-247, 1973.
4. M. Oakes "An Introduction to Thick Film Resistor Trimming by Laser", Optical Engineering, 17(3), pp. 217-224, 1978.
5. R.L. Waters and M.J. Weiner, "Resistor Trimming and Micromachining with a Yag Laser", Solid State Technology, 13(4), pp. 43-49, 1970.
6. S. Schiller et al. "Electron-Beam Trimming of Thin and Thick Resistor Networks", Solid State Technology, 18(7), pp. 38-44, 1975.
7. J. Shier, "A finite-mesh technique for laser trimming of thin film resistors", IEEE J. Solid-State Circuits, 23(4), pp. 1004-1009, 1988.
8. D.L. Parker et al. "Laser Polysilicon Link Making", IEEE Transactions on Components, Hybrids, and Manufacturing Technology, CHMT-7(4), pp. 438-442, 1984.
9. D.L Parker and H. Weiling, "Polysilicon Resistor Trimming by Laser Link Making", IEEE Transactions on Semiconductor Manufacturing, 3(2), pp. 80-83, 1990.
10. T. Badri Narayana et al. "Mechanism for Downward Trimming of Polymer Resistors", J. Phys. D, 25(4), pp. 717-721, 1991.
11. T. Tobita and H. Takasago "New Trimming Technology of a Thick Film Resistor by the Pulse Voltage Method", IEEE Transactions on Components, Hybrids, and Manufacturing Technology, 14(3), pp. 613-617, 1991.
12. D.W. Feldbaumer et al. "Pulse Current Trimming of Polysilicon Resistors", IEEE Transactions on Electron Devices, 42(4), pp. 689-695, 1995.
13. E. Säckinger and W. Guggenbühl "An Analog Trimming Circuit Based on a Floating-Gate Device", IEEE J. Solid-State Circuits, SC-23(6), pp. 1437-1440, 1988.
14. Y. Gagnon, M. Meunier, Y. Savaria, "Method and Apparatus for Iteratively Selectively Tuning the Impedance of Integrated Semiconductor Devices Using a Focussed Heating Source", US Patents 09/332, 059 and PCT # 06042-002-WO-1 by LTRIM Technologies Inc, 2000.
15. S.S. Cohen, P.W. Wyatt, G.H. Chapman, and J.M. Canter, "Laser-induced diode linking for wafer-scale integration", IEEE Trans. Electron Devices, 35(9), pp.1533-1550, 1988.
16. S.S. Cohen, P.W. Wyatt, G.H. Chapman, and J.M. Canter, "The resistance of laser-diffused diode links ", IEEE Trans. Electron Devices, 36(6), pp.1220-1223, 1989.
17. S.M. Sze, Physics of Semiconductor Devices, 2nd Edition, p. 29, John Wiley & Sons, New York, 1981.
18. H. Kodera, "Diffusion Coefficients of Impurities in Silicon Melt", Jap. J. Appl. Phys., 2(4), pp.212-219, 1963.
19. J.E. Moody and R. H. Hendel, "Tempareture Profiles induced by a scanning cw laser beam", J. Appl. Phys., 53(6), pp. 4364-4371, 1982.