Variation of band-edge position with errors in the monitoring of layer termination level for long and short-wave pass filters

Applied Optics

Volumn 38, Issue 25, 1999, Pages 5447-5451

  Willey, Ronald R ^a,b   Machado, David E ^a  

^a Raytheon Optical Systems Inc   (United States)

^b NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0043233938     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.005447     Document Type: Article

References (8)

1. W. P. Thoeni, “Deposition of optical coatings: process control and automation,” Thin Solid Films 88, 385-397 (1982).
2. H. A. Macleod and E. Pelletier, “Error compensation mechanisms in some thin-film monitoring systems,” Opt. Acta 24, 907-930 (1977).
3. F. Zhao, “Monitoring of periodic multilayer by the level method,” Appl. Opt. 24, 3339-3342 (1985).
4. R. R. Willey, “Monitoring and control of thin film growth,” in Practical Design and Production of Optical Thin Films (Marcel Dekker, New York, 1996).
5. R. R. Willey, “Optical thickness monitoring sensitivity improvement using graphical methods,” Appl. Opt. 26, 729-737 (1987).
6. J. H. Apfel, “Graphics in optical coating design,” Appl. Opt. 11, 1303-1312 (1972).
7. S. R. Schmidt and R. G. Launsby, “Box-Behnken designs,” in Understanding Industrial Designed Experiments (Air Academy Press, Colorado Springs, Colo., 1994), Sect. 3.8.doe kiss, version 97 for Windows, Air Academy Associates (and Digital Computations, Inc.), 1155 Kelly Johnson Blvd., Colorado Springs, Colo. 80920 (1997).
8. FilmStar Design, FTG Software Associates, P.O. Box 579, Princeton, N.J. 08542 (1998).