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Diamond and Related Materials

Volumn 6, Issue 1, 1997, Pages 85-88

Diamond deposition from halogenated methane precursors on Si and SiC substrates

(3) Nyberg, T a Heszler, P a,b Carlsson, J O a

a UPPSALA UNIVERSITY (Sweden)

b INSTITUTE OF EXPERIMENTAL MEDICINE (Hungary)

Author keywords

Etching; Halogenated; Halomethane; SiC

Indexed keywords

EID: 0043223870 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(96)00586-9 Document Type: Article

Times cited : (7)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.