A theoretical model of electrostatic ultrasonic transducers with micro air-gap structure

Chinese Science Bulletin

Volumn 43, Issue 9, 1998, Pages 728-731

  Ge, Lifeng ^a  

^a ANHUI UNIVERSITY   (China)

Author keywords

Electrostatic ultrasonic transducer; Micro air gap structure; Modelling

Indexed keywords

EID: 0043195134     PISSN: 10016538     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02898947     Document Type: Article

References (6)

1. Hietanen, J., Stor-Pellinen, J., Luukala, M., A model for an electrostatic ultrasonic transducer with a grooved backplate, Meas. Sci. Technol., 1992, 3: 1095.
2. Rafig, M., Wykes, C., The performance of capacitive ultrasonic transducers using V-grooved backplates, Meas. Sci. Technol, 1991, 2: 168.
3. Mattila, P., Tsuzuki, F., Vaataja, H. et al., Electroacoustic model for electrostatic ultrasonic transducers with V-grooved backplates, IEEE Trans. Ultrasonics, Ferroelectrics, Frequency Control, 1995, 42(1): 1.
4. Anderson, M. J., Hill, J. A., Fortunko, C. M. et al., Broadband electrostatic transducers: Modelling and experiments, J. Acoust. Soc. Am., 1995, 97(1): 262.
5. Ge, L. F., Finkelstein, L., Theoretical prediction of the natural frequency of electrostatic ultrasonic transducers, J. Acoust. Soc. Am. 1995, 98(5): 2917.
6. Ge. L. F., DK model for electrostatic ultrasonic transducers with V-grooved backplates, J. Acoust. Soc. Am., 1996, 100 (4): 2809.