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Volumn 141, Issue 3, 2003, Pages 370-378
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A mathematical model for silicon chlorination
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Author keywords
Chlorination; Kinetics; Mass transfer; Mathematical model; Silicon
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Indexed keywords
DIFFUSION;
MASS TRANSFER;
MATHEMATICAL MODELS;
REACTION KINETICS;
SILICON;
MASS TRANSPORT;
CHLORINATION;
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EID: 0043194000
PISSN: 09240136
EISSN: None
Source Type: Journal
DOI: 10.1016/S0924-0136(03)00290-5 Document Type: Article |
Times cited : (2)
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References (14)
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