Passivation of GaAs/AlGaAs heterojunction bipolar transistors by S2Cl2 solution

Applied Physics Letters

Volumn 70, Issue 6, 1997, Pages 747-749

  Cao, Xian An ^a   Hou, Xiao Yuan ^a   Chen, Xi Ying ^a   Li, Zhe Shen ^a   Su, Run Zhou ^a,b   Ding, Xun Min ^a   Wang, Xun ^a  

^a FUDAN UNIVERSITY   (China)

^b NORTHEAST FORESTRY UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0043193036     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118268     Document Type: Article

References (13)

1. C. J. Sandroff, R. N. Nottenberg, J. C. Bischoff, and R. Bhat, Appl. Phys. Lett. 51, 33 (1987).
2. M. S. Carpenter, M. R. Melloch, and T. E. Dungan, Appl. Phys. Lett. 53, 66 (1988).
3. M. S. Carpenter, M. R. Melloch, B. A. Cowans, Z. Dardas, and W. N. Deldass, J. Vac. Sci. Technol. B 7, 845 (1989).
4. Jia-Fa Fan, Haruhiro Oigawa, and Yasuo Nannichi, Jpn. J. Appl. Phys. 27, L2125 (1988).
5. Y. Wang, Y. Darici, and P. H. Holloway, J. Appl. Phys. 71, 2746 (1992).
6. X. Y. Hou, W. Z. Cai, Z. Q. He, P. H. Hao, Z. S. Li, X. M. Ding, and X. Wang, Appl. Phys. Lett. 60, 2252 (1992).
7. T. Tiedje, K. M. Colbow, D. Rogers, Z. Fu, and W. Eberhardt, J. Vac. Sci. Technol. B 7, 837 (1989).
8. C. H. Ashby, K. R. Zavadil, A. J. Howard, and B. E. Hammons, Appl. Phys. Lett. 64, 2388 (1994).
9. A. N. MacInnes, M. B. Power, and A. R. Barron, Appl. Phys. Lett. 62, 713 (1993).
10. Z. S. Li, W. Z. Cai, R. Z. Su, G. S. Dong, D. M. Ding, X. Y. Hou, and X. Wang, Appl. Phys. Lett. 64, 3425 (1994).
11. J. Wang, X. H. Liu, Z. S. Li, R. Z. Su, Z. Ling, W. Z. Cai, X. Y. Hou, and X. Wang, Appl. Phys. Lett. 67, 2043 (1995).
12. R. S. Besser and C. R. Helms, Appl. Phys. Lett. 52, 1707 (1988).
13. C. J. Spindt, R. S. Besser, R. Cao, K. Miyano, C. R. Helms, and W. E. Spicer, Appl. Phys. Lett. 54, 1148 (1989).