Growth kinetics of SiO2 on (001) Si catalyzed by Cu3Si at elevated temperatures

Journal of Applied Physics

Volumn 88, Issue 3, 2000, Pages 1412-1417

  Huang, H Y ^a   Chen, L J ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0043190319     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.373832     Document Type: Article

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