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Volumn 169-170, Issue , 2001, Pages 387-391
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Investigations on the sulphur incorporation in sputtered Cu, In multilayer precursors
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
COPPER;
GLASS;
GRAPHITE;
INDIUM;
MAGNETRON SPUTTERING;
MULTILAYERS;
SCANNING ELECTRON MICROSCOPY;
SPUTTER DEPOSITION;
SUBSTRATES;
SULFUR;
X RAY DIFFRACTION ANALYSIS;
SULPHURIZATION;
METALLIC SUPERLATTICES;
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EID: 0043178095
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(00)00689-9 Document Type: Article |
Times cited : (7)
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References (19)
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