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Volumn 169-170, Issue , 2001, Pages 387-391

Investigations on the sulphur incorporation in sputtered Cu, In multilayer precursors

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COPPER; GLASS; GRAPHITE; INDIUM; MAGNETRON SPUTTERING; MULTILAYERS; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; SUBSTRATES; SULFUR; X RAY DIFFRACTION ANALYSIS;

EID: 0043178095     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00689-9     Document Type: Article
Times cited : (7)

References (19)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.