Theoretical and experimental study of linear motors using surface acoustic waves

Sensors and Actuators, A: Physical

Volumn 70, Issue 1-2, 1998, Pages 67-74

  Hélin, Philippe ^a,b   Sadaune, Véronique ^a   Druon, Christian ^a  

^a OPTO+   (France)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Friction; Modeling; Surface acoustic waves; Ultrasonic motor

Indexed keywords

EID: 0043138981     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00114-9     Document Type: Article

References (11)

1. c superconductors, Sensors and Actuactors A 29 (1991) 143-150.
2. S. Konishi, H. Fujita, A conveyance system using air flow based on the concept of distributed micro-motion systems, J. Micro-Electromechanical Syst. 3 (2) (1994) 54-58.
3. M. Ataka, A. Omokada, N. Takeshima, H. Fujita, Fabrication and operation of polyimide bimorph actuators for a ciliary motion system, J. Micro-Electromechanical Syst. 2 (4) (1993) 146-150.
4. S. Ueha, Y. Tomikawa, Ultrasonic Motors, Theory and Applications, Clarendon Press, Oxford, 1993.
5. M. Moroney, R. White, R. Howe, Ultrasonic Micro-motors, Proc. IEEE Ultrasonic Symposium, 1989, pp. 745-748.
6. M. Kurosawa, M. Takahashi, T. Higuchi, An ultrasonic XY stage using 10 MHz surface acoustic wave, Proc. IEEE Ultrasonic Symposium, 1994, pp. 535-538.
7. P. Hélin, V. Sadaune, C. Druon, J.B. Tritsch, Linear ultrasonic motors using surface acoustic waves. A mechanical model for energy transfer, Tech. Digest, 9th International Conference Solid-State Sensors and Actuators) (Transducers'97), 1997, pp. 1047-1050.
8. P. Hélin, C. Druon, V. Sadaune, A micro-conveyor using surface acoustic waves in the HF band, Proc. Mecatronics 2 (1996) 580-582.
9. I. Viktorov, Rayleigh and Lamb Waves, Plenum, New York, 1967.
10. S. Datta, Surface Acoustic Wave Devices, Prentice-Hall, NJ, 1986.
11. S. Timoshenko, J. Goodier, Theory of Elasticity, 3rd edn., McGraw-Hill, New York, 1970.