Inelastic electron tunnelling spectroscopy in N-MOS junctions with ultra-thin gate oxide

Solid-State Electronics

Volumn 47, Issue 10, 2003, Pages 1663-1668

  Petit, C ^a   Salace, G ^a   Vuillaume, D ^b  

^a UNIVERSITÉ DE REIMS CHAMPAGNE ARDENNE   (France)

^b INSTITUT D ELECTRONIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON TUNNELING; MOLECULES; MOS DEVICES; SILICA; SPECTROSCOPIC ANALYSIS; SUBSTRATES;

INELASTIC ELECTRON TUNNELING;

SOLID STATE DEVICES;

EID: 0043095343     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(03)00179-5     Document Type: Conference Paper

References (21)

1. Hansma P.K. Tunnelling spectroscopy. 1982;Plenum Press, New York.
2. Salace G., Petit C., Vuillaume D. J. Appl. Phys. 91(9):2002;5896.
3. Klein J., Leger A., Belin M., Dufourneau D., Sangster M.J.L. Phys. Rev. B. 7:1972;2336.
4. Lye W.K., Hasegawa E., Ma T.P., Barker R.C., Hu Y., Kuehun J.et al. Appl. Phys. Lett. 71:1997;2523.
5. Balk P., Do-Thanh L., Ewert S., Kuball M., Schmitz S. Appl. Surf. Sci. 30:1987;304.
6. Bencuya I. Electron tunnel-oxide-degenerate silicon junctions. PhD thesis, U.M.I Dissertation information Service. 1984.
7. Wolf E.L. Phys. Rev. Lett. 20(5):1968;204.
8. Brockhouse B.N. Phys. Rev. Lett. 2(6):1959;256.
9. Kovchavtsev A.P., Kurishev G.L., Postnikov K.O., Sokolov R.A., Subbotin I.M. Phys. Stat. Sol. 106:1988;669.
10. Kulda J., Strauch D., Davoine P., Ishï Y. Phys. Rev. B. 50:1994;1347.
11. Balkanski M., Nazarewicz W. J. Phys. Chem. Solids. 23:1961;573.
12. Fistul V.I. Heavily doped semiconductors. 1969;Plenum Press, New York.
13. Lye WK, Ma TP, Barker RC, Hasegawa E, Hu Y, Kuehun J, et al. In: Seiler DG, Diebold AC, Bullis WM, Shaffner TJ, McDonald R, Walters EJ, editors. Characterization and metrology for ULSI technology: 1998 International Conference.
14. Kirk C.T. Phys. Rev. B. 38:1988;1255.
15. Asche M., Sarbei O.G. Phys. Stat. Sol. B. 103:1981;11.
16. Fischetti M.V., Dimaria D.J., Dori L., Bajey J., Tierney E., Stasiak J. Phys. Rev. B. 35:1987;4404.
17. Langan J.D., Hansma P.K. Surf. Sci. 52:1975;211.
18. Jaklevic R.C., Lambe J. Phys. Rev. Lett. 17(22):1966;1139.
19. Simonsen M.G., Coleman R.V., Hansma P.K. J. Chem. Phys. 9:1974;3789.
20. Yanson I.K., Bogatina N.I., Verkin B.J., Shklyarevskii O.I. Soviet Phys. JETP. 35(3):1972;540.
21. Lange P. J. Appl. Phys. 66:1989;201.