Characterization of etched tracks and nanotubules by ion transmission spectrometry

International Workshop and Tutorials on Electron Devices and Materials, EDM - Proceedings

Volumn 1, Issue , 2002, Pages 36-39

  Stolterfoht, N ^a   Fink, D ^a   Petrov, A ^b   Muller M ^a   Vacik, J ^c   Cervena, J ^c   Hnatowicz, V ^c   Chadderton, L T ^d   Berdinsky, A S ^e  

^a HAHN MEITNER INSTITUT   (Germany)

^b INSTITUTE OF SOLID STATE AND SEMICONDUCTOR PHYSICS   (Belarus)

^c NUCLEAR PHYSICS INSTITUTE   (Czech Republic)

^d AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^e NOVOSIBIRSK STATE TECHNICAL UNIVERSITY   (Russian Federation)

Author keywords

Etching; Particle beam measurements; Particle beams; Particle measurements; Physics; Polymers; Scanning electron microscopy; Solid state circuits; Spectroscopy; Target tracking

Indexed keywords

ELECTRON DEVICES; ELECTRON MICROSCOPY; ELECTRONS; ETCHING; ION BEAMS; IONS; PARTICLE BEAMS; PHYSICS; POLYMERS; SCANNING ELECTRON MICROSCOPY; SPECTROMETRY; SPECTROSCOPY; TARGET TRACKING;

AVERAGE DIAMETER; BEAM DIVERGENCE; CYLINDRICAL TRACKS; FUTURE APPLICATIONS; ION TRANSMISSION; PARTICLE BEAM MEASUREMENTS; PARTICLE MEASUREMENT; SOLID-STATE CIRCUITS;

CHARACTERIZATION;

EID: 0043068945     PISSN: 18153712     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SREDM.2002.1024302     Document Type: Conference Paper

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