Polymer film thickness determination with a high-precision scanning reflectometer

Applied Spectroscopy

Volumn 50, Issue 1, 1996, Pages 119-125

  Shelley, Paul H ^a   Booksh, Karl S ^a   Burgess, Lloyd W ^a   Kowalski, Bruce R ^a  

^a UNIVERSITY OF WASHINGTON   (United States)

Author keywords

Autocorrelation; Fiber optic sensor; Interferometry; Optical low coherence reflectometry (OLCR); Polymer film thickness

Indexed keywords

EID: 0043055871     PISSN: 00037028     EISSN: None     Source Type: Journal    
DOI: 10.1366/0003702963906771     Document Type: Article

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