High-resolution submicron retarding field energy analyzer for low-temperature plasma analysis

Applied Physics Letters

Volumn 75, Issue 25, 1999, Pages 3923-3925

  Blain, M G ^a   Stevens, J E ^a   Woodworth, J R ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0043047163     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.125495     Document Type: Article

References (8)

1. J. R. Woodworth, M. E. Riley, D. C. Meister, B. P. Aragon, M. S. Le, and H. H. Sawin, J. Appl. Phys. 80, 1304 (1996), and references therein.
2. E. A. Edelberg, A. Perry, N. Benjamin, and E. S. Aydil, J. Vac. Sci. Technol. A 17, 506 (1999), and references therein.
3. J. A. Simpson, Rev. Sci. Instrum. 32, 1283 (1961).
4. R. Jones, Rev. Sci. Instrum. 49, 21 (1978).
5. J. H. Moore, C. C. Davis, and M. A. Coplan, Building Scientific Apparatus (Addison-Wesley, Reading, MA, 1983), p. 308.
6. See, for example, the dimensions of electroformed mesh products by Buckbee-Mears St. Paul at www.bmcind.com.
7. See, for example, the dimensions of pinhole aperture products by OptoSigma at www.optosigma.com.
8. "SIMON 3D Version 6.0" by D. A. Dahl, 43rd ASMS Conference on Mass Spectrometry and Allied Topics, 21-26 May 1995, Atlanta, GA, p. 717.