Investigation for oxygen sensor of LaF3 thin film

Sensors and Actuators, B: Chemical

Volumn 34, Issue 1-3, 1996, Pages 417-421

  Tan, Quo Long ^a   Wu, Xi Jun ^a   Wang, Li Ren ^a   Chen, Yu Quan ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

LaF3; Oxygen sensor; RF sputtering; Thin film; XPS analysis

Indexed keywords

EID: 0043046817     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-4005(96)01913-2     Document Type: Article

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