Structure models of the "C-type" defect on Si(001)

Materials Science and Engineering B

Volumn 37, Issue 1-3, 1996, Pages 168-171

  Miyazaki, Takehide ^a   Uda, Tsuyoshi ^b   Terakura, Kiyoyuki ^a  

^a NATL INST FOR ADV INTERDISC RES   (Japan)

^b JRCAT   (Japan)

Author keywords

C type defect; Defect formation; Silicon; Surface defects

Indexed keywords

EID: 0043039313     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/0921-5107(95)01479-9     Document Type: Article

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