All-optical probing of material structure by second-harmonic generation: Application to piezoelectric aluminum nitride thin films

Optical Engineering

Volumn 36, Issue 4, 1997, Pages 1191-1195

  Blanc, Danièle ^a   Cachard, Alain ^a   Pommier, Jean Claude ^a  

^a UNIVERSITÉ JEAN MONNET   (France)

Author keywords

Optical diagnostic; Piezoelectricity; Second harmonic generation; Thin film characterization

Indexed keywords

EID: 0043037617     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601240     Document Type: Article

References (14)

1. G. Marowsky, G. Lüpke, R. Steinhoff, L. F. Chi, and D. Möbius, "Anisotropic second-order nonlinearities of organic monolayers," Phys. Rev. B 41(7), 4480-4483 (1990).
2. O. A. Aktsipetrov, A. V. Melnikov, Y. N. Moiseev, and T. V. Murzina, "Second harmonic generation and atomic-force microscopy studies of porous silicon," Appl. Phys. Lett. 67(9), 1191-1193 (1995).
3. E. J. Canto-Said, S. Lehmann, and G. Marowsky, "Inorganic thin film anisotropy studied by second-harmonic generation," Nonlin. Opt. 3, 341-347 (1992).
4. G. L. Richmond, J. M. Robinson, and V. L. Shannon, "Second harmonic generation studies of interfacial structure and dynamics," Prog. Surface Sci. 28(1), 1-70 (1988).
5. V. Mizrahi, F. Suits, J. E. Sipe, U. J. Gibson, and G. I. Stegeman, "New probe of thin-film microstructure," Appl. Phys. Lett. 51(6), 427-429 (1987).
6. D. Blanc, A. Cachard, J. C. Pommier, J. F. Roux, and J. L. Coutaz, "Characterization of aluminium nitride thin film structure using second-harmonic generation," Opt. Mater. 3, 41-45 (1994).
7. W. N. Herman and L. M. Hayden, "Maker fringes revisited: second-harmonic generation from birefringent or absorbing materials," J. Opt. Soc. Am. 12(3), 416-427 (1995).
8. S. Strite and H. Morkoç, "GaN, AlN and InN: a review," J. Vac. Sci. Technol. B 10(4), 1237-1266 (1992).
9. A. Cachard, R. Fillit, I. Kadad, and J. C. Pommier, "Magnetron sputtering deposited AlN waveguides: effect of the structure on optical properties," Vacuum 41(4-6), 1151-1153 (1990).
10. W. P. Lin, P. M. Lundquist, G. K. Wong, E. D. Rippert, and J. B. Kettrson, "Second order optical nonlinearities of radio frequency sputter-deposited AlN thin films," Appl. Phys. Lett. 63(21), 2875-2877 (1993).
11. Y. Fujii, S. Yoshida, S. Misawa, S. Maikawa, and T. Sakudo, "Nonlinear optical susceptibilities of AlN film," Appl. Phys. Lett. 31(12), 815-816 (1977).
12. A. Cachard, J. C. Pommier, N. Tirolle, and A. Choujaa, "Elaboration and characterization of piezoelectric AlN films deposited by dc reactive magnetron sputtering," 5th Proc. Trends and New Applications in Thin Films, Societe Française du Vide and Deutsche Vakuum Gesellschaft, Colmar, France (April 1996).
13. J. Miragliotta and T. E. Furtak, "In situ determination of the structure of an electrodeposited monolayer using optical second-harmonic generation," Phys. Rev. B 37(2), 1028-1030 (1988).
14. K. Pedersen, "Second-harmonic generation from surfaces and centrosymmetric media," in Studies in Classical and Quantum Nonlinear Optics, O. Keller, Ed., pp. 385-417, Nova Science Publishers, New York (1992).