Combined atomic force microscope and acoustic wave devices: Application to electrodeposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 4, 2003, Pages 1500-1505

  Friedt, J M ^a   Francis, L ^a   Choi, K H ^a   Frederix, F ^a   Campitelli, A ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE PROPAGATION; ACOUSTIC WAVES; ATOMIC FORCE MICROSCOPY; ELECTRODEPOSITION; FREQUENCIES; GOLD; MICROSCOPIC EXAMINATION; SURFACES; VISCOSITY;

ACOUSTIC WAVE BASED SENSOR; ACOUSTIC WAVE DEVICES; QUARTZ CRYSTAL MICROBALANCE; SURFACE ACOUSTIC WAVE LOVE MODE DEVICES;

SENSORS;

EID: 0043031338     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1579014     Document Type: Article

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