Investigations on the relations between crystal structure and electrical properties of ZrO2 thin films

Zhongguo Jiguang/Chinese Journal of Lasers

Volumn 30, Issue 4, 2003, Pages 345-348

  Zhang, Ning Lin ^a   Song, Zhi Tang ^a   Xing, Su ^a   Wan, Qing ^a   Lin, Cheng Lu ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

Crystal structure; Electrical property; PLD; Substrate temperature; Thin film physics; ZrO2 thin film

Indexed keywords

CRYSTAL STRUCTURE; DEPOSITION; DIFFRACTION; SUBSTRATES;

ELECTRICAL PROPERTY; PULSED LASER DEPOSITION; SUBSTRATE TEMPERATURE; THIN FILM PHYSICS;

THIN FILMS;

EID: 0042967439     PISSN: 02587025     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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