Applications of the normal-incidence rotating-sample ellipsometer to high- and low-spatial-frequency gratings

Applied Optics

Volumn 35, Issue 13, 1996, Pages 2235-2238

  Cui, Y ^a   Azzam, R M A ^a  

^a UNO College of Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042952520     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.002235     Document Type: Article

References (17)

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11. Spectrogon US, Inc., Parsippany, N.J.
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13. L. G. Schulz, “Optical constants of silver, gold, copper, and aluminum. I. The absorption coefficient k,” J. Opt. Soc. Am. 44, 357-368 (1954).
14. G. Haas and L. Hardley, “Optical properties of metals,” in American Institute of Physics Handbook, D. E. Gray, ed. (McGraw-Hill, New York, 1972), 6-118-6-169.
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16. It is possible to obtain independent information about the surface profile using techniques such as atomic-force microscopy and to measure the optical constants of the deposited gold film on an optical flat during the same coating cycle used to prepare the grating.
17. American Holographic, Inc., Littleton, Mass.