Developing sub-90nm low-k/Cu solutions

Solid State Technology

Volumn 46, Issue 8, 2003, Pages

  Buchanan, Keith ^a   Sermon, Peter ^a   Siblerud, Paul ^b  

^a Trikon Technologies Ltd   (United Kingdom)

^b Semitool Incorporated   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLEANING; COPPER; ELECTROLYTES; OPTIMIZATION; POROUS MATERIALS;

COPPER DAMASCENE DEVICE STRUCTURES; SEMICONDUCTOR INDUSTRY;

SEMICONDUCTOR DEVICE STRUCTURES;

EID: 0042886058     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (0)