SCOPUS 정보 검색 플랫폼

Volumn 521, Issue , 2000, Pages 161-166

Investigation of na impurities on si wafer surfaces using TXRF

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; DROPS; FLUORESCENCE; SILICON WAFERS; SODIUM; SYNCHROTRONS;

DETECTION LIMITS; EXCITATION SOURCES; MINIMUM DETECTION LIMITS; SI WAFER; STANFORD; TOTAL REFLECTION X-RAY FLUORESCENCE ANALYSIS; TUNABILITIES;

SYNCHROTRON RADIATION;

EID: 0042850463 PISSN: 0094243X EISSN: 15517616 Source Type: Conference Proceeding
DOI: 10.1063/1.1291778 Document Type: Conference Paper

Times cited : (2)

References (10)

1
- 0000709164
- P. Pianetta, N. Takaura, S. Brennan, W. Tompkins, S. S. Laderman, A. Fischer-Colbrie, A. Shimazaki, K. Miyazaki, M. Madden, D. C. Wherry, J. B. Kortright, Rev. Sci. Instrum. 66. 1293 (1995).
- (1995) Rev. Sci. Instrum. , vol.66 , pp. 1293
- Pianetta, P.¹ Takaura, N.² Brennan, S.³ Tompkins, W.⁴ Laderman, S.S.⁵ Fischer-Colbrie, A.⁶ Shimazaki, A.⁷ Miyazaki, K.⁸ Madden, M.⁹ Wherry, D.C.¹⁰ Kortright, J.B.¹¹

2
- 0003666676
- S. M. Mini, D. L. Perry, S. R. Stock, L. J. Terminello, MRS, Boston
- S. Brennan, P. Pianetta, S. Gosh, N. Takaura, C. Wiemer, A. Fischer-Colbrie, S. Laderman, A. Shimazaki, A. Waldhauer, M. A. Zaitz, in Application of Synchrotron Radiation Techniques to Materials Science IV 542, ed. S. M. Mini, D. L. Perry, S. R. Stock, L. J. Terminello, MRS, Boston (1998).
- (1998) Application of Synchrotron Radiation Techniques to Materials Science IV , vol.542
- Brennan, S.¹ Pianetta, P.² Gosh, S.³ Takaura, N.⁴ Wiemer, C.⁵ Fischer-Colbrie, A.⁶ Laderman, S.⁷ Shimazaki, A.⁸ Waldhauer, A.⁹ Zaitz, M.A.¹⁰

3
- 85096451760
- Pianetta, K. Baur, S. Brennan, D. Werho, J. Wang, to be published in Thin Solid Films
- P. Pianetta, K. Baur, S. Brennan, D. Werho, J. Wang, to be published in Thin Solid Films.

4
- 85096446881
- C. Streli, P. Kregsamer, P. Wobrauschek, H. Gatterbauer, P. Pianetta, S. Pahlke, L. Fabry, L. Palmetshafer, M. Schmeling, accepted in Spectrochim. Acta B.
- Accepted in Spectrochim. Acta B.
- Streli, C.¹ Kregsamer, P.² Wobrauschek, P.³ Gatterbauer, H.⁴ Pianetta, P.⁵ Pahlke, S.⁶ Fabry, L.⁷ Palmetshafer, L.⁸ Schmeling, M.⁹

5
- 0027151540
- M. C. Madden, D. C. Wherry, P. Pianetta, S. Brennan, Materials Research Society: Pittsburgh, 125 (1993).
- (1993) Materials Research Society: Pittsburgh , pp. 125
- Madden, M.C.¹ Wherry, D.C.² Pianetta, P.³ Brennan, S.⁴

6
- 0000207366
- C. J. Sparks, Phys. Rev. Lett. 33, 262 (1974).
- (1974) Phys. Rev. Lett. , vol.33 , pp. 262
- Sparks, C.J.¹

7
- 85096447217
- K. Baur, J. Kerner, S. Brennan, Pianetta, to be published
- K. Baur, J. Kerner, S. Brennan, P. Pianetta, to be published.

8
- 0000093963
- P. Eisenberger, P. M. Platzmann, H. Winick, Phys. Rev. Lett. 36, 623 (1976).
- (1976) Phys. Rev. Lett. , vol.36 , pp. 623
- Eisenberger, P.¹ Platzmann, P.M.² Winick, H.³

9
- 0023976908
- J. M. Jaklevic, R. D. Giauque, A. C. Thompson, Anal. Chem.6Q, 482 (1988).
- (1988) Anal. Chem.6Q , pp. 482
- Jaklevic, J.M.¹ Giauque, R.D.² Thompson, A.C.³

10
- 0003689657
- New York, Plenum Press
- E. P. Berlin, Principles and Practice ofX-Ray Spectrometric Analysis, New York, Plenum Press, 1975.
- (1975) Principles and Practice ofX-Ray Spectrometric Analysis
- Berlin, E.P.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.