Three-ports micro ER valve for ER suspension fabricated by photolithography

Journal of Intelligent Material Systems and Structures

Volumn 13, Issue 7-8, 2002, Pages 503-508

  Nakano, Masami ^a   Katou, Teruo ^a   Satou, Akira ^a   Miyata, Kaoru ^a   Matsushita, Kouichi ^a  

^a YAMAGATA UNIVERSITY   (Japan)

Author keywords

Electrorheological suspension; Flow switching characteristics; Micro ER valve; Micro machine; Non Newtonian fluid; Photolithography

Indexed keywords

MICROACTUATORS; NON NEWTONIAN LIQUIDS; PHOTORESISTS; SUSPENSIONS (FLUIDS);

ELECTRORHEOLOGICAL SUSPENSION; FLOW SWITCHING CHARACTERISTICS; MICRO MACHINE;

VALVES (MECHANICAL);

EID: 0042849108     PISSN: 1045389X     EISSN: None     Source Type: Journal    
DOI: 10.1106/104538902030329     Document Type: Article

References (4)

1. Klass, D.L. and Martinek, T.W. 1967. "Electroviscous Fluids. I: Rheological Properties," J. Applied. Physics, 38(1):67-74.
2. Nakano, M., Aizawa, R. and Asako, Y. 1996. "Steady and Transient Responses of Electrorheological Suspension Passing Through a Tectangular Channel," Int. J. of Mod. Physics B, 10(23&24):2965-2972.
3. Nakano, M., Minagawa, S. and Hagino, K. 1999. "PWM Flow Rate Control of ER Valve and Its Application to ER Actuator Control," Int. J. of Mod. Physics B, 13(14,15&16):2168-2175.
4. Wolff, C. 1996. "Closed Loop Controlled ER-Actuator," Int. J. of Mod. Physics B, 10(23&24):2867-2876.