Integrated polymer thin film macroporous silicon microsystems

Journal of the Indian Institute of Science

Volumn 81, Issue 5, 2001, Pages 563-567

  Misra, S C K ^a   Bhattacharya, R ^a   Angelucci, R ^b  

^a NATIONAL PHYSICAL LABORATORY   (India)

^b CNR   (Italy)

Author keywords

Food and water borne diseases; Microbial infestation; Si wafer; Silicon microsystems; Vacuum deposited polymeric thin films

Indexed keywords

MICROORGANISMS; PLASTIC FILMS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DOPING; THIN FILMS;

SILICON MICROSYSTEMS;

POROUS SILICON;

EID: 0042819770     PISSN: 09704140     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (3)

1. MISRA, S. C. K. AND CHANDRA, S. Electronic applications of semiconducting polymers, Special issue on conducting polymers, Indian J. Chem., 1994, 33, 583-594.
2. AMRANI, M. E. H., PAYNE, P. A. AND PERSAUD, K. C. 8th Int. Conf. on Solid-State Sensors and Actuators and Eurosensors IX, Digest of Technical Papers, Vol. 1, pp. 811-813, Foundation for Sensors & Actuator Technologies, Stockholm, Sweden, 1995.
3. LEHMANN, V. AND FOLL, H. Formation mechanism and properties of electrochemically etched tranches in N-type silicon, J. Electrochem. Soc., 1990, 137, 653-659.